Development and Characterization of Ultrasonic Vibration Assisted Nanomachining Process for Three-Dimensional Nanofabrication

出版年份 2018 全文链接

标题

作者

关键词

出版物

Volume 17, Issue 3, Pages 559-566

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2018-04-14

DOI

10.1109/tnano.2018.2826841

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