Extraction of Process Variation Parameters in FinFET Technology Based on Compact Modeling and Characterization

标题
Extraction of Process Variation Parameters in FinFET Technology Based on Compact Modeling and Characterization
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 65, Issue 3, Pages 847-854
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2018-01-18
DOI
10.1109/ted.2018.2790083

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