A High-Precision and High-Bandwidth MEMS-based Capacitive Accelerometer - Peeref

标题

A High-Precision and High-Bandwidth MEMS-based Capacitive Accelerometer

作者

关键词

-

出版物

IEEE SENSORS JOURNAL

Volume -, Issue -, Pages 1-1

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2018-06-23

DOI

10.1109/jsen.2018.2849873

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