Design and Electrochemical Characterization of Ion-Sensitive Capacitors With ALD Al2O3 as the Sensitive Dielectric

标题
Design and Electrochemical Characterization of Ion-Sensitive Capacitors With ALD Al2O3 as the Sensitive Dielectric
作者
关键词
-
出版物
IEEE SENSORS JOURNAL
Volume 18, Issue 1, Pages 231-236
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2017-09-21
DOI
10.1109/jsen.2017.2754958

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