期刊
ELECTRONIC MATERIALS LETTERS
卷 14, 期 3, 页码 305-313出版社
KOREAN INST METALS MATERIALS
DOI: 10.1007/s13391-018-0030-5
关键词
MEMS; Gas sensor; Hydrogen; Thin film; PdO; Micro-heater
资金
- National Research Foundation of Korea grant - Korean government (MEST) [NRF-2015R1D1A1A01059806]
- Korea Health Technology R&D Project through the Korea Health Industry Development Institute (KHIDI) - Ministry of Health and Welfare, Republic of Korea [HI16C0272]
We report a micromachined H-2 sensor that is composed of a Pt micro-heater, low-stress insulating layer (SiO2/SiNx/SiO2), Pt-interdigitated electrodes, and gas sensing materials. Three types of Pt micro-heater are designed as function of electrode width, and their thermal properties are systematically analyzed by finite element modeling FEM with infrared camera. The power consumptions when the surface temperature reached 150, 200, 250, and 300 degrees C are calculated to approximately 33, 48, 67 and 85 mW, respectively. The response of the PdO nanoparticles-decorated TiO2 thin films to H-2 is much higher than those of other gases such as CH4 and CO at 200 degrees C (48 mW). Further, the response time is reduced to approximately 3 s. The enhancement of gas sensing properties is related to well-designed micro-heater and catalytic effects of PdO nanoparticles such as electronic and chemical sensitization. These results suggest that the PdO nanoparticles-decorated TiO2 thin film, namely MEMS-based H-2 sensors are very promising for use in IoT application to improve the quality of human's life. [GRAPHICS] .
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