4.8 Article

Electron Backscatter Diffraction Study of Hexagonal Boron Nitride Growth on Cu Single-Crystal Substrates

期刊

ACS APPLIED MATERIALS & INTERFACES
卷 7, 期 28, 页码 15200-15205

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acsami.5b00723

关键词

boron nitride; 2-D; crystal orientation; EBSD; copper substrates; XPS

资金

  1. Office of Naval Research
  2. ASEE

向作者/读者索取更多资源

Hexagonal boron nitride (h-BN) is an important material for the development of new 2D heterostructures. To enable this development, the relationship between crystal growth and the substrate orientation must be explored and understood. In this study, we simultaneously grew h-BN on different orientations of Cu substrates to establish the impact of substrate structure on the growth habit of thin h-BN layers. The substrates studied were a polycrystalline Cu foil, Cu(100), Cu(110), and Cu(111). Fourier transform grazing-incidence infrared reflection absorption spectroscopy (FT-IRRAS) was used to identify h-BN on copper substrates. X-ray photoelectron spectroscopy (XPS) was used to determine the effective thickness of the h-BN. Scanning electron microscopy (SEM) and electron backscatter diffraction (EBSD) were used to measure the morphology of the films and postgrowth crystal structure of the Cu substrates, respectively. Combining the SEM and EBSD images allowed for the correlation between h-BN film coverage and the crystal structure of Cu. It was found that the growth rate was inversely proportional to the surface free energy of the Cu surface, with Cu(111) having the most h-BN surface coverage. The Cu foil predominately crystallized with a (100) surface orientation, and likewise had a film coverage very close to the Cu(100).

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.8
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

Article Physics, Applied

Characterization of β-Ga2O3 homoepitaxial films and MOSFETs grown by MOCVD at high growth rates

Marko J. Tadjer, Fikadu Alema, Andrei Osinsky, Michael A. Mastro, Neeraj Nepal, Jeffrey M. Woodward, Rachael L. Myers-Ward, Evan R. Glaser, Jaime A. Freitas, Alan G. Jacobs, James C. Gallagher, Alyssa L. Mock, Daniel J. Pennachio, Jenifer Hajzus, Mona Ebrish, Travis J. Anderson, Karl D. Hobart, Jennifer K. Hite, Charles R. Eddy Jr.

Summary: Gallium oxide as an ultra-wide bandgap semiconductor shows significant potential in advancing power electronic devices due to its high breakdown electric field and mature substrate technology. However, a key challenge remains in growing electronic-grade epitaxial layers at rates consistent with the thickness needed for high voltage technologies. This study reports on the characterization of epitaxial layers grown at relatively high rates, showing improved quality and potential for future high voltage power device technologies.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2021)

Article Physics, Applied

Site control of quantum emitters in gallium nitride by polarity

Minh Anh Phan Nguyen, Jennifer Hite, Michael A. Mastro, Mehran Kianinia, Milos Toth, Igor Aharonovich

Summary: This study investigates the nature of quantum emitters in GaN grown on samples with different growth orientations, revealing consistent formation of quantum emitters in Ga-polar regions. Findings shed light on the origins of these quantum emitters and demonstrate site-selective formation in GaN. Through various tests, the overall defectivity of Ga-polar GaN synthesized using a specific growth procedure is attributed to the formation of quantum emitters.

APPLIED PHYSICS LETTERS (2021)

Article Materials Science, Coatings & Films

Assessment of the (010) β-Ga2O3 surface and substrate specification

Michael A. Mastro, Charles R. Eddy, Marko J. Tadjer, Jennifer K. Hite, Jihyun Kim, Stephen J. Pearton

Summary: Recent advancements in bulk crystal growth of beta-Ga2O3 have led to commercialization of large-area substrates and high-quality films on (010) substrates, revealing subnanometer-scale facets and larger ridges on the surface. Recommendations for standardizing substrates to control ridge formation have been proposed based on density function theory calculations.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2021)

Article Engineering, Electrical & Electronic

Effect of GaN Substrate Properties on Vertical GaN PiN Diode Electrical Performance

James C. Gallagher, Travis J. Anderson, Andrew D. Koehler, Mona A. Ebrish, Geoffrey M. Foster, Michael A. Mastro, Jennifer K. Hite, Brendan P. Gunning, Robert J. Kaplar, Karl D. Hobart, Francis J. Kub

Summary: This work focuses on fabricating vertical p-i-n GaN diodes using Raman spectroscopy to monitor carrier concentration, discovering that the uniformity of the wafers affects device performance. Avoiding electron-donating defects in the wafers significantly improves rectification ratio and reduces reverse bias leakage current.

JOURNAL OF ELECTRONIC MATERIALS (2021)

Article Engineering, Electrical & Electronic

Process Optimization for Selective Area Doping of GaN by Ion Implantation

Mona A. Ebrish, Travis J. Anderson, Alan G. Jacobs, James C. Gallagher, Jennifer K. Hite, Michael A. Mastro, Boris N. Feigelson, Yekan Wang, Michael Liao, Mark Goorsky, Karl D. Hobart

Summary: This research examines the optimal conditions for Mg ion implantation and activation, finding that in situ epitaxial-grown AlN caps are more suitable for GaN activation annealing, and a high dose is needed at the surface to facilitate ohmic contact formation. This work provides valuable information for achieving an electrical activation of implanted Mg while maintaining the integrity of the crystalline structure of GaN.

JOURNAL OF ELECTRONIC MATERIALS (2021)

Article Materials Science, Coatings & Films

Homoepitaxial GaN micropillar array by plasma-free photo-enhanced metal-assisted chemical etching

Clarence Y. Chan, Shunya Namiki, Jennifer K. Hite, Michael A. Mastro, Syed B. Qadri, Xiuling Li

Summary: Metal-assisted chemical etching is a plasma-free method that can produce high aspect ratio structures, with potential applications in electronic and optoelectronic devices. The method was successfully demonstrated with ordered micropillar arrays of homoepitaxial GaN, showing promising results in spatially resolved photoluminescence. This approach may also be extended to InGaN and AlGaN, offering a facile and scalable processing route for III-nitride based devices.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2021)

Article Instruments & Instrumentation

Thermal conductivity measurements of sub-surface buried substrates by steady-state thermoreflectance

Md Shafkat Bin Hoque, Yee Rui Koh, Kiumars Aryana, Eric R. Hoglund, Jeffrey L. Braun, David H. Olson, John T. Gaskins, Habib Ahmad, Mirza Mohammad Mahbube Elahi, Jennifer K. Hite, Zayd C. Leseman, W. Alan Doolittle, Patrick E. Hopkins

Summary: This study investigates the thermal conductivity of buried substrates using the optical pump-probe technique SSTR, providing guidance for future measurements. The steady-state nature of SSTR allows it to measure the thermal properties of buried substrates that are traditionally challenging to measure with transient pump-probe techniques.

REVIEW OF SCIENTIFIC INSTRUMENTS (2021)

Article Materials Science, Coatings & Films

Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition

Jeffrey M. Woodward, Samantha G. Rosenberg, David R. Boris, Michael J. Johnson, Scott G. Walton, Scooter D. Johnson, Zachary R. Robinson, Neeraj Nepal, Karl F. Ludwig Jr, Jennifer K. Hite, Charles R. Eddy Jr

Summary: Plasma-enhanced atomic layer deposition (PEALD) enables the epitaxial growth of ultrathin indium nitride (InN) films with reduced process temperatures and better control of layer thickness. The relationship between plasma properties and growth kinetics is crucial for optimizing growth parameters. In this study, in situ investigation using grazing incidence small-angle x-ray scattering (GISAXS) reveals that the production of nitrogen species in the plasma influences the growth mode, with high concentrations promoting island growth and low concentrations promoting layer-plus-island growth. The results demonstrate the potential to control the growth kinetics of epitaxial films during PEALD by manipulating specific plasma species generation regimes.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2022)

Article Engineering, Electrical & Electronic

Threshold switching stabilization of NbO2 films via nanoscale devices

M. C. Sullivan, Zachary R. Robinson, Karsten Beckmann, Alex Powell, Ted Mburu, Katherine Pittman, Nathaniel Cady

Summary: The influence of sample growth and device characteristics on the stabilization of threshold switching characteristics of NbOx is examined. It is found that the smallest nanoscale devices exhibit large asymmetry in IV curves and a large threshold voltage, while larger devices and microscale devices show symmetric behavior. The resistance of the devices scales with the area, indicating a crystallized bulk NbO2 device. The annealed nanoscale devices exhibit similar electrical responses as electroformed microscale crossbar devices.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2022)

Article Materials Science, Multidisciplinary

Novel Codoping Moiety to Achieve Enhanced P-Type Doping in GaN by Ion Implantation

Alan G. Jacobs, Joseph A. Spencer, Jennifer K. Hite, Karl D. Hobart, Travis J. Anderson, Boris N. Feigelson

Summary: Codoping of gallium nitride with magnesium and silicon or oxygen via ion implantation and symmetric multicycle rapid thermal annealing is demonstrated. The results show enhanced photoluminescence, especially with oxygen codoping. The addition of nitrogen helps to balance stoichiometry and suppress defect photoluminescence signals. These findings have important implications for device design and the future use of ion implantation.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2023)

Review Crystallography

A Review of Homoepitaxy of III-Nitride Semiconductors by Metal Organic Chemical Vapor Deposition and the Effects on Vertical Devices

Jennifer K. Hite

Summary: This paper reviews the basic issues in homoepitaxial growth of III-nitrides for vertical device technology. It focuses on using MOCVD to grow GaN and explores the effects of native substrate characteristics on material quality and device performance. The review also includes theoretical understanding of dopants in AlN and BN for future expansion into these materials.

CRYSTALS (2023)

Article Crystallography

Efficient Activation and High Mobility of Ion-Implanted Silicon for Next-Generation GaN Devices

Alan G. G. Jacobs, Boris N. N. Feigelson, Joseph A. A. Spencer, Marko J. J. Tadjer, Jennifer K. K. Hite, Karl D. D. Hobart, Travis J. J. Anderson

Summary: Selective area doping is crucial for modern devices. In this study, efficient silicon ion activation in GaN was achieved through symmetrical multicycle rapid thermal annealing. The activation efficiency and mobility improved with increasing annealing temperature. The results demonstrate efficient dopant activation with low unintentional doping, making it suitable for high-voltage, high-power devices. Additionally, high activation and mobility have been achieved with GaN on sapphire, which offers commercial potential due to its large-area and robust substrates.

CRYSTALS (2023)

Article Microscopy

Methodology and implementation of a tunable deep-ultraviolet laser source for photoemission electron microscopy

Andrew J. Winchester, Travis J. Anderson, Jennifer K. Hite, Randolph E. Elmquist, Sujitra Pookpanratana

Summary: Photoemission electron microscopy (PEEM) is a powerful tool for studying electronic properties. Traditionally, it was mainly used with synchrotron light sources, but recent advancements in solid-state lasers have allowed for the development of laboratory-based PEEMs using laser-based UV light. This study reports on the characteristics of a laser-based UV light source integrated with a PEEM instrument and highlights the improved image quality compared to conventional light sources.

ULTRAMICROSCOPY (2023)

Proceedings Paper Engineering, Electrical & Electronic

Plasma -free Anisotropic Etching of GaN

Clarence Y. Chan, Shunya Namiki, Jennifer K. Hite, Xiuling Li

Summary: In this study, photo-enhanced metal-assisted chemical etching was demonstrated on homoepitaxial n-UaN on HVPE GaN substrates. The etch rate achieved was comparable to or better than using RIE, with no degradation in band-edge emission observed.

2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) (2021)

暂无数据