Thermal failure mechanism of multilayer brittle TiN/CrAlN films

标题

作者

关键词

TiN/CrAlN multilayer films, Annealing, Mechanical properties, Thermal failure mechanism

出版物

Volume 44, Issue 7, Pages 8138-8144

出版商

Elsevier BV

发表日期

2018-02-02

DOI

10.1016/j.ceramint.2018.01.260

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