Investigation of the heating behavior of carbide-bonded graphene coated silicon wafer used for hot embossing

标题
Investigation of the heating behavior of carbide-bonded graphene coated silicon wafer used for hot embossing
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 435, Issue -, Pages 130-140
出版商
Elsevier BV
发表日期
2017-11-10
DOI
10.1016/j.apsusc.2017.11.050

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