Simple and low-cost nanofabrication process of nanoimprint templates for high-quality master gratings: Friction-induced selective etching

标题
Simple and low-cost nanofabrication process of nanoimprint templates for high-quality master gratings: Friction-induced selective etching
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 454, Issue -, Pages 23-29
出版商
Elsevier BV
发表日期
2018-05-19
DOI
10.1016/j.apsusc.2018.05.147

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