Effect of film thickness on the ferroelectric and dielectric properties of low-temperature (400 °C) Hf0.5Zr0.5O2 films

标题
Effect of film thickness on the ferroelectric and dielectric properties of low-temperature (400 °C) Hf0.5Zr0.5O2 films
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 112, Issue 17, Pages 172902
出版商
AIP Publishing
发表日期
2018-04-26
DOI
10.1063/1.5026715

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