Big Data Analytics for Smart Manufacturing: Case Studies in Semiconductor Manufacturing

Big Data Capabilities Applied to Semiconductor Manufacturing Advanced Process Control

(2016) James Moyne et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Tutorial on Applying the VM Technology for TFT-LCD Manufacturing

(2015) Fan-Tien Cheng et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

An approach to monitoring quality in manufacturing using supervised machine learning on product state data

(2013) Thorsten Wuest et al.   JOURNAL OF INTELLIGENT MANUFACTURING

Smart manufacturing, manufacturing intelligence and demand-dynamic performance

(2012) Jim Davis et al.   COMPUTERS & CHEMICAL ENGINEERING

Yield Management Enhanced Advanced Process Control System (YMeAPC)—Part I: Description and Case Study of Feedback for Optimized Multiprocess Control

(2010) James Moyne et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

State estimation in high-mix semiconductor manufacturing

(2008) Jin Wang et al.   JOURNAL OF PROCESS CONTROL