Method for Measurement of Multi-Degrees-of-Freedom Motion Parameters Based on Polydimethylsiloxane Cross-Coupling Diffraction Gratings

标题
Method for Measurement of Multi-Degrees-of-Freedom Motion Parameters Based on Polydimethylsiloxane Cross-Coupling Diffraction Gratings
作者
关键词
Cross coupling diffraction gratings, Multi-degrees of freedom, Motion parameter measurement, PDMS
出版物
Nanoscale Research Letters
Volume 12, Issue 1, Pages -
出版商
Springer Nature
发表日期
2017-08-30
DOI
10.1186/s11671-017-2289-0

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