Preparation and thermal volatility characteristics of In2O3/ITO thin film thermocouple by RF magnetron sputtering

标题
Preparation and thermal volatility characteristics of In2O3/ITO thin film thermocouple by RF magnetron sputtering
作者
关键词
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出版物
AIP Advances
Volume 7, Issue 11, Pages 115025
出版商
AIP Publishing
发表日期
2017-11-30
DOI
10.1063/1.4999246

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