期刊
BEILSTEIN JOURNAL OF NANOTECHNOLOGY
卷 8, 期 -, 页码 1532-1545出版社
BEILSTEIN-INSTITUT
DOI: 10.3762/bjnano.8.155
关键词
dielectric; encapsulation layer; flexible substrate; organic field effect transistor; Parylene C
资金
- Polish National Research Centre [2012/07/B/ST8/03789, DEC-2013/08/M/ST5/00914, UMO-2015/18/E/ST3/00322]
An emerging new technology, organic electronics, is approaching the stage of large-scale industrial application. This is due to a remarkable progress in synthesis of a variety of organic semiconductors, allowing one to design and to fabricate, so far on a laboratory scale, different organic electronic devices of satisfactory performance. However, a complete technology requires upgrading of fabrication procedures of all elements of electronic devices and circuits, which not only comprise active layers, but also electrodes, dielectrics, insulators, substrates and protecting/encapsulating coatings. In this review, poly(chloro-para-xylylene) known as Parylene C, which appears to become a versatile supporting material especially suitable for applications in flexible organic electronics, is presented. A synthesis and basic properties of Parylene C are described, followed by several examples of use of parylenes as substrates, dielectrics, insulators, or protecting materials in the construction of organic field-effect transistors.
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