期刊
BEILSTEIN JOURNAL OF NANOTECHNOLOGY
卷 8, 期 -, 页码 1056-1064出版社
BEILSTEIN-INSTITUT
DOI: 10.3762/bjnano.8.107
关键词
contacts; deposition; encapsulation; graphene; process integration
资金
- European Commission under project Graphene Flagship [696656]
- European Commission under project GRADE [317839]
Since 2004 the field of graphene research has attracted increasing interest worldwide. Especially the integration of graphene into microelectronic devices has the potential for numerous applications. Therefore, we summarize the current knowledge on this aspect. Surveys show that considerable progress was made in the field of graphene synthesis. However, the central issue consists of the availability of techniques suitable for production for the deposition of graphene on dielectric substrates. Besides, the encapsulation of graphene for further processing while maintaining its properties poses a challenge. Regarding the graphene/metal contact intensive research was done and recently substantial advancements were made towards contact resistances applicable for electronic devices. Generally speaking the crucial issues for graphene integration are identified today and the corresponding research tasks can be clearly defined.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据