The improved corrosion resistance of sputtered CrN thin films with Cr-ion bombardment layer by layer

出版年份 2017 全文链接

标题

作者

关键词

Corrosion behavior, Ion bombardment, CrN film, Sputtering, Filtered arc ion plating

出版物

Volume 143, Issue -, Pages 329-335

出版商

Elsevier BV

发表日期

2017-06-28

DOI

10.1016/j.vacuum.2017.06.040

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