期刊
VACUUM
卷 143, 期 -, 页码 447-453出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2017.03.011
关键词
-
This investigation presents the results of the development of a vacuum arc discharge-based repetitively pulsed high-current low-energy ion beam formation for material surface modification. A DC vacuum arc was used to produce a metal plasma flow. A plasma immersion approach was used for high-frequency short-pulse metal ion beam formation. A grid hemisphere with radii of 5, 7.5 or 10.5 cm was immersed in a titanium vacuum-arc plasma. Bias pulses with an amplitude in the range of 1-2.6 kV, pulse duration in the range of 2-8 mu s, and pulse repetition rate of 10(5) pulses per second were applied to the grid. A repetitively pulsed mode of negative bias formation provided a possibility to increase the amplitude of bias up to several kilovolts and to focus ion beams with ion space charge neutralisation. The influence of bias pulse amplitude and duration on the parameters of formed ion beams was investigated. Titanium ion beams with a current density of more than 1 A/cm(2) and a pulsed ion beam power density up to 2.6 kW/cm(2) were obtained. The possibility of macroparticle-free high-intensity ion beam formation for surface modification of materials was demonstrated. (C) 2017 Elsevier Ltd. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据