Fabrication and characterization of ITO thin film resistance temperature detector

标题
Fabrication and characterization of ITO thin film resistance temperature detector
作者
关键词
ITO, Thin film, RTD, TCR, Sensor
出版物
VACUUM
Volume 140, Issue -, Pages 121-125
出版商
Elsevier BV
发表日期
2016-07-26
DOI
10.1016/j.vacuum.2016.07.028

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