Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer
出版年份 2017 全文链接
标题
Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer
作者
关键词
-
出版物
Small
Volume 13, Issue 44, Pages 1702422
出版商
Wiley
发表日期
2017-09-30
DOI
10.1002/smll.201702422
参考文献
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