期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 248, 期 -, 页码 957-960出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2017.02.040
关键词
Carbon dioxide; Gas sensor; Electrochemical; MEMS
资金
- R&D Center for Green Patrol Technologies through the R&D for Global Top Environmental Technologies - Ministry of Environment, Republic of Korea(MOE)
- R&D Convergence Program of NST (National Research Council of Science & Technology) of Republic of Korea
- Development of Advanced 3D Printing Technology for the Realistic Artificial Hand - KIST-ETRI projects
Micro carbon dioxide gas sensor with low power consumption and high selectivity was fabricated based on micro-heater and electrochemical operation method. Li3PO4 thick film for solid electrolyte and Li2CO3 thick film for sensing material were deposited successively using screen printing technique on Si substrate in the form of slurry. In structure of micro-heater, the resistances of the two semi-circled Pt heaters are connected to the spreader for thermal uniformity. Based on the above design, a low power consumption carbon dioxide gas sensor was fabricated using a CMOS compatible MEMS process. Bridge type micro-heater based on Si substrate was fabricated by surface micromachining technique. Micro gas sensor showed a value of about 50.5 mV/decade for air based carbon dioxide gas with 59 mW power consumption. (C) 2017 Elsevier B.V. All rights reserved.
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