Design and test of a micromachined resonant accelerometer with high scale factor and low noise

标题
Design and test of a micromachined resonant accelerometer with high scale factor and low noise
作者
关键词
Resonant accelerometer, Scale factor, Noise, Vibration amplitude, Nonlinear vibration, Frequency measurement
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 268, Issue -, Pages 52-60
出版商
Elsevier BV
发表日期
2017-10-27
DOI
10.1016/j.sna.2017.10.043

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