期刊
SENSORS
卷 17, 期 7, 页码 -出版社
MDPI AG
DOI: 10.3390/s17071529
关键词
SAW sensor; hydrogen sensor; bilayer; pulsed laser deposition; nanoporous film; Palladium; ZnO
资金
- Romanian National Authority for Scientific Research and Innovation, CNCS-UEFISCDI [PNII-RU-TE-2014-4-0342, NUCLEU 16470104]
A Surface Acoustic Wave (SAW) hydrogen sensor with a Pd/ZnO bilayer structure for room temperature sensing operation has been obtained by Pulsed Laser Deposition (PLD). The sensor structure combines a Pd layer with optimized porosity for maximizing mass effects, with the large acoustoelectric effect at the Pd/ZnO interface. The large acoustoelectric effect is due to the fact that ZnO has a surface conductivity which is highly sensitive to chemisorbed gases. The sensitivity of the sensor was determined for hydrogen concentrations between 0.2% and 2%. The limit of detection (LOD) of the bilayer sensor was about 4.5 times better than the single ZnO films and almost twice better than single Pd films.
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