Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

标题
Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors
作者
关键词
-
出版物
SENSORS
Volume 17, Issue 11, Pages 2672
出版商
MDPI AG
发表日期
2017-11-21
DOI
10.3390/s17112672

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