Surface preparation and patterning by nano imprint lithography for the selective area growth of GaAs nanowires on Si(111)

标题
Surface preparation and patterning by nano imprint lithography for the selective area growth of GaAs nanowires on Si(111)
作者
关键词
-
出版物
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 32, Issue 11, Pages 115003
出版商
IOP Publishing
发表日期
2017-09-13
DOI
10.1088/1361-6641/aa8c15

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