Photocatalysis assisting the mechanical polishing of a single-crystal SiC wafer utilizing an anatase TiO 2 -coated diamond abrasive

出版年份 2017 全文链接

标题

作者

关键词

TiO, 2, coating, SiC wafer, Photocatalysis, Polishing

出版物

Volume 49, Issue -, Pages 235-242

出版商

Elsevier BV

发表日期

2017-02-18

DOI

10.1016/j.precisioneng.2017.02.011

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