In pursuit of Moore’s Law: polymer chemistry in action

Laser-Induced Sub-millisecond Heating Reveals Distinct Tertiary Ester Cleavage Reaction Pathways in a Photolithographic Resist Polymer

(2014) Byungki Jung et al.   ACS Nano

Metal Oxide Nanoparticle Photoresists for EUV Patterning

(2014) Jing Jiang et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

C60-containing polymers for electron beam lithography

(2014) Haruyuki Okamura et al.   POLYMER BULLETIN

Controlled roughness reduction of patterned resist polymers using laser-induced sub-millisecond heating

(2014) Byungki Jung et al.   Journal of Materials Chemistry C

Tailored Star Block Copolymer Architecture for High Performance Chemically Amplified Resists

(2012) Florian Wieberger et al.   ADVANCED MATERIALS

Dual Mode Patterning of Fluorine-Containing Block Copolymers through Combined Top-down and Bottom-up Lithography

(2012) Rina Maeda et al.   CHEMISTRY OF MATERIALS

Nanoparticle photoresists from HfO2 and ZrO2 for EUV patterning

(2012) Markos Trikeriotis et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Orthogonal Patterning of PEDOT:PSS for Organic Electronics using Hydrofluoroether Solvents

(2009) Priscilla G. Taylor et al.   ADVANCED MATERIALS

Orthogonal Processing: A Novel Photolithographic Patterning Method for Organic Electronics

(2009) Jin-Kyun Lee et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Calix[4]resorcinarene Derivatives as High-Resolution Resist Materials for Supercritical CO2 Processing

(2008) Nelson M. Felix et al.   ADVANCED MATERIALS

Hydrofluoroethers as Orthogonal Solvents for the Chemical Processing of Organic Electronic Materials

(2008) Alexander A. Zakhidov et al.   ADVANCED MATERIALS

Study of the Structure−Properties Relationship of Phenolic Molecular Glass Resists for Next Generation Photolithography

(2008) Anuja De Silva et al.   CHEMISTRY OF MATERIALS

Hydroxyphenylbenzene derivatives as glass forming molecules for high resolution photoresists

(2008) Anuja De Silva et al.   JOURNAL OF MATERIALS CHEMISTRY