Influence of discharge voltage on the sensitivity of the resultant sputtered NiO thin films toward hydrogen gas

标题
Influence of discharge voltage on the sensitivity of the resultant sputtered NiO thin films toward hydrogen gas
作者
关键词
Gas discharge plasma, NiO thin film, Sputtering, Gas sensitivity
出版物
PHYSICA B-CONDENSED MATTER
Volume 514, Issue -, Pages 78-84
出版商
Elsevier BV
发表日期
2017-03-28
DOI
10.1016/j.physb.2017.03.037

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