期刊
ELECTRONICS LETTERS
卷 51, 期 19, 页码 1532-1533出版社
INST ENGINEERING TECHNOLOGY-IET
DOI: 10.1049/el.2015.1684
关键词
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资金
- French Defence Ministry (DGA)
- French RENATECH network
A three-terminal breakdown voltage over 3 kV is reported on AlGaN/GaN high-electron-mobility transistors (HEMTs) grown on silicon (Si) (111) substrate with a buffer thickness of 5.5 mu m. The breakdown voltage of the 1.5 x 50 mu m(2) devices has been improved by more than 200% by applying a local substrate removal all around the drain of the transistors in order to suppress the parasitic substrate conduction phenomenon. This establishes a new record breakdown voltage for GaN-on-silicon lateral power devices while maintaining a low specific on-resistance of about 10 m Omega center dot cm(2).
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