Fabrication of Nanoscale Pits with High Throughput on Polymer Thin Film Using AFM Tip-Based Dynamic Plowing Lithography
出版年份 2017 全文链接
标题
Fabrication of Nanoscale Pits with High Throughput on Polymer Thin Film Using AFM Tip-Based Dynamic Plowing Lithography
作者
关键词
AFM, PMMA film, Nanoscale pit, Nanogroove, Fast-scan nanolithography, DPL
出版物
Nanoscale Research Letters
Volume 12, Issue 1, Pages -
出版商
Springer Nature
发表日期
2017-09-22
DOI
10.1186/s11671-017-2319-y
参考文献
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