Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition

标题
Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
作者
关键词
Black phosphorus, Plasma-enhanced atomic layer deposition, Oxygen plasma, Al<sub>2</sub>O<sub>3</sub>
出版物
Nanoscale Research Letters
Volume 12, Issue 1, Pages -
出版商
Springer Nature
发表日期
2017-04-20
DOI
10.1186/s11671-017-2016-x

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