Electron tomography analysis of 3D interfacial nanostructures appearing in annealed Si rich SiC films

标题
Electron tomography analysis of 3D interfacial nanostructures appearing in annealed Si rich SiC films
作者
关键词
-
出版物
Nanoscale
Volume 9, Issue 20, Pages 6703-6710
出版商
Royal Society of Chemistry (RSC)
发表日期
2017-04-20
DOI
10.1039/c7nr00799j

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