Radiation and Internal Loss Engineering of High-Stress Silicon Nitride Nanobeams

标题
Radiation and Internal Loss Engineering of High-Stress Silicon Nitride Nanobeams
作者
关键词
-
出版物
NANO LETTERS
Volume 17, Issue 6, Pages 3501-3505
出版商
American Chemical Society (ACS)
发表日期
2017-04-01
DOI
10.1021/acs.nanolett.7b00573

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