Directed Self-Assembly of Polystyrene-b-poly(propylene carbonate) on Chemical Patterns via Thermal Annealing for Next Generation Lithography

标题
Directed Self-Assembly of Polystyrene-b-poly(propylene carbonate) on Chemical Patterns via Thermal Annealing for Next Generation Lithography
作者
关键词
-
出版物
NANO LETTERS
Volume 17, Issue 2, Pages 1233-1239
出版商
American Chemical Society (ACS)
发表日期
2017-01-10
DOI
10.1021/acs.nanolett.6b05059

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