Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation
出版年份 2017 全文链接
标题
Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation
作者
关键词
-
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 24, Issue 3, Pages 1545-1552
出版商
Springer Nature
发表日期
2017-09-30
DOI
10.1007/s00542-017-3554-y
参考文献
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