Piezoelectric MEMS vibrational energy harvesters: Advances and outlook

标题
Piezoelectric MEMS vibrational energy harvesters: Advances and outlook
作者
关键词
Energy harvesting, Piezoelectric thin films, MEMS
出版物
MICROELECTRONIC ENGINEERING
Volume 183-184, Issue -, Pages 23-36
出版商
Elsevier BV
发表日期
2017-10-11
DOI
10.1016/j.mee.2017.10.005

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