Macromodeling of thermally driven V-shaped MEMS actuators

标题

作者

关键词

Macromodeling, Lumped modeling, Euler-Bernoulli beam theory, Dynamic thermoelastic buckling, Galerkin method

出版物

Volume 46, Issue -, Pages 193-204

出版商

Elsevier BV

发表日期

2017-04-26

DOI

10.1016/j.mechatronics.2017.03.006

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