A theoretical study of an improved capacitive pressure sensor: Closed-form solution of uniformly loaded annular membranes

出版年份 2017 全文链接

标题

作者

关键词

Capacitive pressure sensor, Parallel plate capacitor, Annular membrane, Closed-from solution

出版物

Volume 111, Issue -, Pages 84-92

出版商

Elsevier BV

发表日期

2017-07-16

DOI

10.1016/j.measurement.2017.07.025

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