Broad range refractive index engineering of Si x N y and SiO x N y thin films and exploring their potential applications in crystalline silicon solar cells

标题
Broad range refractive index engineering of Si x N y and SiO x N y thin films and exploring their potential applications in crystalline silicon solar cells
作者
关键词
Slicon nitride, Silicon oxynitride, PECVD, Varying refractive index, Crystalline silicon solar cells
出版物
MATERIALS CHEMISTRY AND PHYSICS
Volume 197, Issue -, Pages 181-191
出版商
Elsevier BV
发表日期
2017-05-20
DOI
10.1016/j.matchemphys.2017.05.035

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