Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

出版年份 2017 全文链接

标题

作者

关键词

出版物

Volume 35, Issue 1, Pages 010801

出版商

American Vacuum Society

发表日期

2016-12-17

DOI

10.1116/1.4971389

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