Fabrication of single-phase SnS film by H2 annealing of amorphous SnSx prepared by atomic layer deposition

标题
Fabrication of single-phase SnS film by H2 annealing of amorphous SnSx prepared by atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 3, Pages 031506
出版商
American Vacuum Society
发表日期
2017-03-22
DOI
10.1116/1.4978892

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