Heating mechanisms of magnetized capacitively coupled argon plasmas excited by tailored voltage waveforms

标题
Heating mechanisms of magnetized capacitively coupled argon plasmas excited by tailored voltage waveforms
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 6, Pages 061311
出版商
American Vacuum Society
发表日期
2017-10-20
DOI
10.1116/1.4990137

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