Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

标题
Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 1, Pages 01B105
出版商
American Vacuum Society
发表日期
2016-11-05
DOI
10.1116/1.4966198

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