Mechanistic modeling study of atomic layer deposition process optimization in a fluidized bed reactor

标题
Mechanistic modeling study of atomic layer deposition process optimization in a fluidized bed reactor
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 1, Pages 01B102
出版商
American Vacuum Society
发表日期
2016-10-14
DOI
10.1116/1.4964848

向作者/读者发起求助以获取更多资源

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More