Surface passivation of aluminum hydride particles via atomic layer deposition

标题
Surface passivation of aluminum hydride particles via atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 3, Pages 03E111
出版商
American Vacuum Society
发表日期
2017-04-27
DOI
10.1116/1.4982661

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