Optimization of N-doped TiO 2 multifunctional thin layers by low frequency PECVD process

标题
Optimization of N-doped TiO 2 multifunctional thin layers by low frequency PECVD process
作者
关键词
TiO, 2, Low-frequency plasma, N-doping, Photocatalysis
出版物
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
Volume 37, Issue 16, Pages 5289-5303
出版商
Elsevier BV
发表日期
2017-05-19
DOI
10.1016/j.jeurceramsoc.2017.05.010

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