The influence of film deposition temperature on the subsequent post-annealing and crystallization of sputtered Sb 2 S 3 thin films

标题
The influence of film deposition temperature on the subsequent post-annealing and crystallization of sputtered Sb 2 S 3 thin films
作者
关键词
Sb, 2, S, 3, thin films, Sputtering, Spectroscopic ellipsometry, Optical constants
出版物
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
Volume 111, Issue -, Pages 182-189
出版商
Elsevier BV
发表日期
2017-08-02
DOI
10.1016/j.jpcs.2017.07.035

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