Atomic Layer Deposition of Zn(O,S) Alloys Using Diethylzinc with H2O and H2S: Effect of Exchange Reactions

标题
Atomic Layer Deposition of Zn(O,S) Alloys Using Diethylzinc with H2O and H2S: Effect of Exchange Reactions
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 121, Issue 34, Pages 18643-18652
出版商
American Chemical Society (ACS)
发表日期
2017-07-28
DOI
10.1021/acs.jpcc.7b05361

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