期刊
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
卷 17, 期 11, 页码 8480-8484出版社
AMER SCIENTIFIC PUBLISHERS
DOI: 10.1166/jnn.2017.15172
关键词
VUV Spectroscopy; Absorption Spectroscopy; VUV Lamp; Oxygen Radical Density
类别
资金
- Basic Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Education [NRF-2016R1A6A3A01008332]
A compact vacuum ultraviolet (VUV) lamp using helium and oxygen plasma has been developed to emit atomic oxygen triplet S-3(1)-P-3(2, 1, 0) lines, which can be applied to measure absolute oxygen density by a method of absorption spectroscopy. The VUV lamp consists of a negatively biased micro-hollow cathode with a hole of 700 mu m diameter and grounded hole-electrode carrying the gasses. The discharge was confined in the hollow cathode hole when the operating pressure was near 30 Torr in both the pure helium and helium based oxygen diluted plasma. In this condition, the spectral lines of the atomic oxygen triplet emission (130.2, 130.5, 130.6 nm) were observed and the atomic excitation temperature showed higher value than that of a normal glow phase. Typical I-V characteristic of hollow cathode mode such as negative resistivity was also discussed in both the helium and helium-oxygen discharge at the pressure of 30 Torr.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据