Effects of annealing temperature on the structural, morphology, optical properties and resistivity of sputtered CCTO thin film

CaCu3Ti4O12 (CCTO) thin films with a thickness of 200 nm were deposited on ITO substrates by RF magnetron sputtering using a pure CCTO target. After the deposition, thin films were annealed at 400, 450, 500 and 550 A degrees C, respectively, for 1 h. The effects of annealing temperature on the structural, surface morphology, optical properties and resistivity of (CCTO) thin films were investigated. The X-ray diffractometer results show that the thin films are polycrystalline in nature and are assigned to body-centered cubic perovskite configuration with a space group of Im-3. The intensity of the peaks and crystallinity gradually increased with the increase in annealing temperature. Microstructural investigation through FESEM showed that the grain size increased with increase in annealing temperature from 32 to 85 nm. The root mean square and roughness (Ra) were also enhanced with higher annealing temperatures, from 3.8 to 6.2 nm and from 4.7 to 7.7 nm, respectively, as confirmed by AFM. Increase in annealing temperature also affected the optical transmittance values which decreased to almost 60% at the visible range (550-850), as well as the optical energy band gap which decreased from 3.86 to 3.39 eV. The relevance between resistance behaviors and film microstructure is discussed. Therefore, it can be concluded that the desirable crystallinity, surface roughness, energy band gap and resistivity for 200 nm thick CCTO thin films deposited by RF magnetron sputtering can be achieved through the annealing process.