Substrate temperature-dependent physical properties of nanocrystalline zirconium titanate thin films
出版年份 2017 全文链接
标题
Substrate temperature-dependent physical properties of nanocrystalline zirconium titanate thin films
作者
关键词
Zirconium titanate thin films, DC magnetron reactive sputtering, Substrate temperature
出版物
Journal of Coatings Technology and Research
Volume 14, Issue 5, Pages 971-980
出版商
Springer Nature
发表日期
2017-07-07
DOI
10.1007/s11998-017-9951-4
参考文献
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